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Gas Purification System
Gas Purification System can purify bulk or special gases with purity suitable for semiconductor, FPD, LED and Solar manufacturing process to meet user's required quality level. As technology requirements such as high integration and high capacity have become more and more complicated, it becomes a matter of interest to create high efficiency and high profit by the impurities that hinder them. This purification system is the optimal device for this trend.


ACA I Series

Product Features
  • PLC and touch screen based automation system
  • Purification medium : catalyst and adsorbent
  • Purification reaction : Reversible reaction
  • Column lifetime : Semi-permanent use
  • Column recycling : available (process gas / H2)
  • Flow rate : 10-3000 Nm3/hr
Additional Features