Products
- Gas Purification System
- Gas Purification System can purify bulk or special gases with purity suitable for semiconductor, FPD, LED and Solar manufacturing process to meet user's required quality level. As technology requirements such as high integration and high capacity have become more and more complicated, it becomes a matter of interest to create high efficiency and high profit by the impurities that hinder them. This purification system is the optimal device for this trend.
AMG & APG Series
- Product Features
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- Small POU (Point of Use) purifier
- Purification reaction : irreversible reaction
- Column lifetime : change required (Getter Column)
- Column recycling : not available
- Flow rate : 5-100 slpm
- Additional Features
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