Products
- Gas Purification System
- Gas Purification System can purify bulk or special gases with purity suitable for semiconductor, FPD, LED and Solar manufacturing process to meet user's required quality level. As technology requirements such as high integration and high capacity have become more and more complicated, it becomes a matter of interest to create high efficiency and high profit by the impurities that hinder them. This purification system is the optimal device for this trend.
Solvent Trap
- Product Features
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- Device that removes VOC from the chamber during OLED process
- Device that can be used in conjunction with circulation purifier
- Standard Configurations
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- Manifold : Stainless steel piping
- Analyzer
- Absorber Chemical
- Gate Valve
- Oil Free Diaphragm pump
- Regulator
- Safety Cabinet
- Air Valve
- Jacket Heater
- Flowmeter
- Pressure Transducer
- Pressure Gauge
- Features
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- Applicable Gas : Inert Gas
- Flow Rate : 80~8000slpm
- Dimension : Customized
- PLC : Mitsubishi/Omron
- Touch Screen : PFX GP-4501-TAD
- Heater Materials : Inner_Sillica Fiber and Aluminum coating Outer_Sillica Fiber
- Pneumatic Supply : 70~100psig, Clean Dry Air or N2
- Exhaust Gas Temperature : <50℃
- Noise : <60dB
- Regeneration Gas : N2 (Hot)
- Option
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- Glove Box Integration
- Customized Size
- Analyzer Type
- Regeneration Type (Manual, Full Auto)
- Single(Manual) / Dual Type (Auto Change)