Products
- Gas Purification System
- Gas Purification System can purify bulk or special gases with purity suitable for semiconductor, FPD, LED and Solar manufacturing process to meet user's required quality level. As technology requirements such as high integration and high capacity have become more and more complicated, it becomes a matter of interest to create high efficiency and high profit by the impurities that hinder them. This purification system is the optimal device for this trend.
WCP Series
- Product Features
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- A system for refining/circulating high-purity Inert gas for OLED process
- Quick purging for creating the optimum environment inside the chamber
- Circulating high-purity Inert gas to maintain proper environment
- Additional Features
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Chamber
- Product Features
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This is a sealing facility designed to create the required gas environment by removing oxygen and moisture.
It blocks the external impurity contact and connects with circulation purifier to create inert gas balance.
It can be easily added to the existing equipment as it is a modular type.
You can choose a gas purification system or use it in combination with common application programs.
- Standard Configurations
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- Size : Customized
- Material : Stainless Steel 304 construction
- Leak Rate : <0.05Vol % (acc. ISO 10648-2, Class1)
- Vacuum port and feedthrough
- Inlet/Outlet Filter (Class13)
- Scratch Resistant and anti : UV Polycarbonate windows
- Glove Box gloves (Option : size, materials)
- Glove Box glove port (Option : size, materials)
- Led Lamp
- Stainless Steel Shelving
- Features
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- Add Module Box
- Glove Port
- Stainless Steel Construction
- Polycarbonate Window
- Adjustable Shelving
- Castors for easy mobility
- Anti-Reflection Film
- Leveling Feet
- Option
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- Safety Door Interlock
- Camera
- One Touch Door
- Module Box
- Feedthrough
- Filters (Ulpa, Hepa, Solvent)
- Antechamber
- Stainless Steel Piping
- Inert Gas Purification system
- Equipment
- Freezers
- Evaporators
- View Port
- Vacuum Oven
- Hotplates
- Spin Coaters
- Vacuum Cleaners
- Safety Door Locks
- Oxygen and Moisture Analyzer (Add Port up to 4)
- Auto Purge Function
- Chiller
- Heat Exchanger
- Vacuum Dry pump
- Custom Shelving
- Other Options available