Products
- Gas Supply System
- The gas supply system provided by WONIK HOLDINGS is a device for safely supplying special gases required for semiconductor, FPD, LED, and solar manufacturing processes at a constant flow rate and pressure. And various safety devices and programs make the system safe from the risk of gas leakage and operational control errors. We provide the high quality system with modular design concept to the leading companies, fabs, labs, and universities Also, we broaden the spectrum of the product components to enhance user flexibility. It is a system control device that controls the high or low pressure state of special gas to the required pressure for a process, blocks internal and external pollutant by inhibiting and removing fine dust and preventing its leakage so as to supply highly purified gas to the semiconductor manufacturing facility in a safe manner and prevents human error.
VMB/VMP
- Product Features
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- PLC and touch screen based automation system (OMRON, AB, SIEMENS)
- Proven automation sequence for all aspects of operation and maintenance
- Supply method of Inlet 1~2 & Outlet 4 ~ 12
- Flow rate of 1 ~ 100SLPM
- User setting available for all alarms
- Exhaust pressure monitoring
- Emergency off [EMO]
- Multi-level password protection
- Monitoring screen
- Dual DC Power Module
- S-Mark safety certification
- Safety certification for specified high pressure gas cylinder cabinet
- Certified explosion proof (flammable gas)
- Additional Features
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- Weight Scale
- Heating Line
- UVIR
- Valve Shutter
- High Temp Sensor
- Lamp
- Leak Detector