It is the system to safely supply high-purity specialty gases at a consistent flow rate and pressure for semiconductor, OLED, LED, and Solar manufacturing processes. 
Our optimized system validation and technology development with advanced technologies and simulation tools maximize gas supply stability and efficiency, ensuring top quality
and reliability for each manufacturing process.

BSGS (HPCM)
Features
-Designed for high-volume specialty gas supply
-Prevents cooling and freezing due to a sudden high-pressure fluctuations
-Integrated gas cabinet features