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It is the system to safely supply high-purity specialty gases at a consistent flow rate and pressure for semiconductor, OLED, LED, and Solar manufacturing processes.
Our optimized system validation and technology development with advanced technologies and simulation tools maximize gas supply stability and efficiency, ensuring top quality
and reliability for each manufacturing process.
Gas Cabinet
Features
-User-friendly interface easy operation & maintenance
-Safety sequence to improve safety
-Real-time data analysis through system integration
-Customizable designs to meet client requirements
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