We have developed a Recycling System for rare gases used in the lithography process, specifically recycling Ne gas for lithography equipment (laser sources) to enhance efficiency.
*Environmental Care
Reduces emissions from rare gas production and transportation by recycling neon(Ne) gas
Creates a resource recycling system for an eco-friendly semiconductor manufacturing process

*Cost Reduction
Reduces neon(Ne) gas procurment costs through the Neon Recycling system
Reduces additional expenses for gas transportation, storage, and purification.

1. Gas Filter-Gas purifier-Analyzer-Storage Tank-Compression-Filling
2. High-Purity Ne Gas purification
3. Ne Gas for the process
=> Before applying the recycling system-100% of used gas is released into Air

*High-purigy Ne gas purification
Ne Gas, with H2O and CO2 removed, is supplied as high-purity Ne Gas.
*Ne gas for the process
EUV lithography process- Excimer Laser mixed Gas
DUV lithography process-ArF lASER Discharge Gas